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2013 (Vol. 5, Issue: 03)
Article Information:

A MEMS Flow Sensor for Self-adjusted Precise Non-Contact Liquid Dispensing

Liu Yaxin, Zhong Ming and Yao Yufeng
Corresponding Author:  Zhong Ming 

Key words:  Flow sensor, liquid dispensing, MEMS, , , ,
Vol. 5 , (03): 962-969
Submitted Accepted Published
June 22, 2012 July 23, 2012 January 21, 2013

A MEMS flow sensor was proposed to enhance the reliability and accuracy of liquid dispensing system. Benefiting from the feedback of sensor information, the system can self-adjust the open time of the solenoid vale to accurately dispensing desired reagent volume without pre-calibration. This study focuses on the design, fabrication and application of this flow sensor. Firstly, the design, fabrication and characteristics of the MEMS flow sensor based on the measurement of the pressure difference across a flow channel are presented. Secondly, the liquid dispensing system in which the flow sensor is integrated will be introduced. A novel closed-loop control strategy is proposed to calculate valve open-time for each dispensing cycle. Finally, experiments results are presented with different dispensing volumes, Coefficient of Variance (CV) has been shown to be below 3%. It indicates that integration of the MEMS flow sensor and using of a compound intelligent control strategy make the system immune to liquid viscosity, pressure fluctuation and some other disturbances.
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  Cite this Reference:
Liu Yaxin, Zhong Ming and Yao Yufeng, 2013. A MEMS Flow Sensor for Self-adjusted Precise Non-Contact Liquid Dispensing.  Research Journal of Applied Sciences, Engineering and Technology, 5(03): 962-969.
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ISSN (Online):  2040-7467
ISSN (Print):   2040-7459
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