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2013 (Vol. 5, Issue: 03)
Article Information:

Design and Analysis of Silicon Resonant Accelerometer

Jing Li, Shangchun Fan and Zhanshe Guo
Corresponding Author:  Jing Li 

Key words:  Model analysis, silicon resonant accelerometer, structure optimization, , , ,
Vol. 5 , (03): 970-974
Submitted Accepted Published
June 22, 2012 July 23, 2012 January 21, 2013

In this study, we present an approach for micromechanical resonant accelerometer design, structural optimization and testing method of a kind of resonant accelerometer which is excited by the electrostatic force and detected by the change of capacitance. The structure parameters’ influence on capability parameters are analyzed by MATLAB and the mechanical and model analysis of structure are carried out by ANSYS, also, we optimized the structure parameters. Simulating results validates the design thought.
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  Cite this Reference:
Jing Li, Shangchun Fan and Zhanshe Guo, 2013. Design and Analysis of Silicon Resonant Accelerometer.  Research Journal of Applied Sciences, Engineering and Technology, 5(03): 970-974.
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ISSN (Online):  2040-7467
ISSN (Print):   2040-7459
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