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Abstract
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Article Information:
Design and Analysis of Silicon Resonant Accelerometer
Jing Li, Shangchun Fan and Zhanshe Guo
Corresponding Author: Jing Li
Submitted: June 22, 2012
Accepted: July 23, 2012
Published: January 21, 2013 |
Abstract:
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In this study, we present an approach for micromechanical resonant accelerometer design, structural optimization and testing method of a kind of resonant accelerometer which is excited by the electrostatic force and detected by the change of capacitance. The structure parameters’ influence on capability parameters are analyzed by MATLAB and the mechanical and model analysis of structure are carried out by ANSYS, also, we optimized the structure parameters. Simulating results validates the design thought.
Key words: Model analysis, silicon resonant accelerometer, structure optimization, , , ,
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Cite this Reference:
Jing Li, Shangchun Fan and Zhanshe Guo, . Design and Analysis of Silicon Resonant Accelerometer. Research Journal of Applied Sciences, Engineering and Technology, (03): 970-974.
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ISSN (Online): 2040-7467
ISSN (Print): 2040-7459 |
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