Abstract

Micromirror is a very small mirror based on the principle of Micro Electro Mechanical Systems (MEMS). Micromirror application in areas like laser scanning displays, DLP Projection system and HDTV are realized using MEMS technology. In this study, an electrostatically controlled micromirror is designed using COMSOL multi-physics software. The structural and mechanical properties of the actuation mechanism of various shapes of a micro-mirror will be studied. The base materials used will include Copper, Silicon and Aluminum. To make the cantilever more efficient, the structural steel was introduced along with the base materials listed above so as to obtain the displacement of the mirror. In order to evaluate the mirror further, the analytical formulation for Capacitance and Torque are developed and compared to the calculated theoretical values. The final results are shown as a range of wavelength, which will be obtained taking into consideration the tilting angle obtained from various materials used for the designing of the mirrors.

Keywords:

COMSOL , DLP, DMD, electrostatic, HDTV, MEMS,

References

Competing interests

The authors have no competing interests.

Open Access Policy

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Copyright

The authors have no competing interests.