Research Article | OPEN ACCESS
Some Aspects of Analysis of a Micromirror
Dipti Razdan and A.B. Chattopadhyay
Department of Electrical and Electronics Engineering, Birla Institute of Technology and Science, Pilani-Dubai, U.A.E.
Research Journal of Applied Sciences, Engineering and Technology 2015 6:652-662
Received: January 2, 2015 | Accepted: March 20, 2015 | Published: June 20, 2015
Abstract
Micromirror is a very small mirror based on the principle of Micro Electro Mechanical Systems (MEMS). Micromirror application in areas like laser scanning displays, DLP Projection system and HDTV are realized using MEMS technology. In this study, an electrostatically controlled micromirror is designed using COMSOL multi-physics software. The structural and mechanical properties of the actuation mechanism of various shapes of a micro-mirror will be studied. The base materials used will include Copper, Silicon and Aluminum. To make the cantilever more efficient, the structural steel was introduced along with the base materials listed above so as to obtain the displacement of the mirror. In order to evaluate the mirror further, the analytical formulation for Capacitance and Torque are developed and compared to the calculated theoretical values. The final results are shown as a range of wavelength, which will be obtained taking into consideration the tilting angle obtained from various materials used for the designing of the mirrors.
Keywords:
COMSOL , DLP, DMD, electrostatic, HDTV, MEMS,
Competing interests
The authors have no competing interests.
Open Access Policy
This article is distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.
Copyright
The authors have no competing interests.
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ISSN (Online): 2040-7467
ISSN (Print): 2040-7459 |
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