Abstract

In this study, a low cost quartz tuning fork temperature sensor adopting H-shaped tuning fork resonator to address miniaturization, high resolution and high stability has been designed, developed and tested. The quartz tuning temperature sensor is designed using flexural vibrating mode with a new thermo-sensitive cut. The quartz tuning fork temperature sensor consists of two prongs connected at one end of crystalline quartz plate with thin-film metal electrodes deposited on the faces, which is used to produce vibration in response to alternating voltages and detecting the resonance frequency in the meantime. When an external temperature is change, there is a shift in its natural frequency. Finite Element Method (FEM) is used to analyze the vibratory modes and optimize the structure of the sensor. The resonance frequency of tuning fork is about 37 kHz with a sensitivity of rough 80 ppm/°C. The experimental results shown that a temperature accuracy of 0.01°C and a resolution of 0.005°C within temperature range from 0 to 100°C, respectively.

Keywords:

Finite element method, quartz, resonance frequency, temperature senor, tuning fork,

References

Competing interests

The authors have no competing interests.

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The authors have no competing interests.