Research Article | OPEN ACCESS
Design and Analysis of Silicon Resonant Accelerometer
1, 2, 3, 4Jing Li, 1, 2, 3Shangchun Fan and 1, 2, 3Zhanshe Guo
1Department of Instrumentation Science and Optoelectronics Engineering
2State Key Laboratory of Virtual Reality Technology and Systems
3Key Laboratory of Inertial Science and Technology for National Defence, Beihang University, Beijing 100191, China
4Department of Information and Communication Engineering, North University of China, Taiyuan Shanxi 030051, China
Research Journal of Applied Sciences, Engineering and Technology 2013 3:970-974
Received: June 22, 2012 | Accepted: July 23, 2012 | Published: January 21, 2013
Abstract
In this study, we present an approach for micromechanical resonant accelerometer design, structural optimization and testing method of a kind of resonant accelerometer which is excited by the electrostatic force and detected by the change of capacitance. The structure parameters’ influence on capability parameters are analyzed by MATLAB and the mechanical and model analysis of structure are carried out by ANSYS, also, we optimized the structure parameters. Simulating results validates the design thought.
Keywords:
Model analysis, silicon resonant accelerometer, structure optimization,
Competing interests
The authors have no competing interests.
Open Access Policy
This article is distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.
Copyright
The authors have no competing interests.
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ISSN (Online): 2040-7467
ISSN (Print): 2040-7459 |
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