Abstract

Micro Electro Mechanical Systems (MEMS) are uncovered to an assortment of liquid environments in applications such as chemical and biological sensors and micro fluidic devices. Green interactions between liquids and micro scale structures can lead to volatile performance of MEMS in liquid environments. In this study, the design and fabrication of a multi-material high-performance micro pump is presented. The micro pumps are fabricated using MEMS fabrication techniques, comprised of silicon and Pyrex micromachining and bonding. Manufacturing steps such as three small bulk cylindrical piezoelectric material elements that are integrated with micro-fabricated Silicon-on-Insulator (SOI) and glass micro machined substrates using eutectic bonding and anodic bonding processes were successfully realized and provide a robust and scalable production technique for the micro pump. Exceptional flow rates of 0.1 mL/min with 1 W power consumption based on piezoelectric stack actuation achieved by appropriate design optimization.

Keywords:

Anodic bonding, eutectic bonding, MEMS, pyrex micro machining, SOI,

References

Competing interests

The authors have no competing interests.

Open Access Policy

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Copyright

The authors have no competing interests.